星期二,2019年07月30
地址:北京通州区宋庄镇小堡北街宋庄艺术商业中心1号楼805
工厂地址:河北省廊坊市香河机器人产业园1期C3栋
电话:010-60573500
手机:耿彪 13910297918
传真:010-60573500
邮箱:gengbiao@www.bokeben.com
辅助设备
您的位置:首页 > 产品服务 > 辅助设备

设备名称:IPA熏干机
主要用途:适用于硅晶圆片、蓝宝石晶片、硅晶片、砷化镓晶片、锗晶片、碳化硅晶片、磷化铟晶片、掩模板、石英晶片等其它类似基料的高洁净度薄型晶片、破片脱水干燥功能;

项   目

                        数       据

适用对象

2"-12" Wafer 晶舟或晶篮;

控制模式

手动控制模式        半自动控制模式 

基本规格

设备形式

室内放置型

温度:

23±1°C

湿度:

53±5%

机台封面

聚丙烯磁白PP板材(厚度≧10mm)

机台主机强度结构

整体骨架表面喷涂处理

机台视窗

透明、抗靜電之聚氯乙烯PVC(厚度≧5mm)

机台特点

※  本装置具备上喷淋,底部注水,快速排放及槽体顶部四面溢流功能;
※  防静电装置;
※  氮气流量检测装置;
※  不锈钢储存腔体结构采用表面净化处理技术;
※  机台上部设置洁净单元(10级FFU装置);
※  配备自动灭火消防装置及相应安全泄压阀;
※  电器控制、机械结构模组化;
※  晶片干燥时间≤15min;
※  在线式红外加热模组,晶片干燥后无残留水痕;
※  配有日本进口品牌点式漏液感知控制装置配合机台PLC使用;
※  IPA雾化喷淋装置:配有定制式PTFE材质的IPA雾化喷淋装置(专利技术);
※  回收装置:配有IPA凝结回收系统;
※  纯水过滤系统:配有DIW过滤系统,过滤精度0.1u;
※  N2过滤系统:配有N2过滤系统,过滤精度0.003u;
※  体积小,不占空间,可与湿法蚀刻清洗等湿法制程设备结合使用,实现晶圆的干进干出;
※  故障诊断、显示及报警;
※  客制化设计能力佳,高设计能力满足客户制程工艺需要;

操作界面

全图形化中文彩色人机界面;

设备制造

北京华林嘉业科技有限公司(CGB);

页面版权所有@ 北京华林嘉业科技有限公司.京ICP备09080401号.京公网安备11011202001537号
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