星期二,2019年07月30
地址:北京通州区宋庄镇小堡北街宋庄艺术商业中心1号楼805
工厂地址:河北省廊坊市香河机器人产业园1期C3栋
电话:010-60573500
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邮箱:gengbiao@www.bokeben.com
功率器件
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设备名称:硅腐蚀台
用于硅晶片化学腐蚀和清洗的设备

 

项目

                            数        据

适用对象

硅晶片

2-12inch

25 Pcs/cassette

1 cassette/ Batch  Or  2 cassette/ Batch;

控制模式

手动控制模式        自动控制模式

设备用途

用来将4、5、6、8、12英寸硅晶片化学腐蚀和清洗的设备

基本规格

机台封面

聚丙烯磁白PP板材(厚度≧10mm)    

机台主机强度结构

整体骨架表面喷涂处理         

机台视窗

透明、抗靜電之聚氯乙烯PVC(厚度≧5mm) 

选配模块

※  蚀刻液在线降温系统(0℃以下,±0.5℃);
※  蚀刻液循环过滤系统;
※  漏液检测系统;
※  水阻率监测系统;
※  花篮(硅晶片)旋转系统,转动速度可调;
※  自动供给CDS (微补)系统;
※  废液回收系统;
※  可结合客户端通讯协定资料储存、CIM系统、资料分析储存建立管理;
※  纯水节省功能:纯水排放分为回收水管路和废水排放管路,通过程序可以设定回收纯水的倒洗开始周期、以及开始回收的任意时间节点,待料时慢速溢流流纯水实现回收使用。

机械臂装置

Robot的传动预估时间

≤2秒  (保证碎片率在0.02%)以内

机械手传送定位精度

≤0.3mm;

机械手传动预估速度

垂直升降速度不小于4000mm/min,水平移动速度不小于6000mm/min;

机械臂走向

前后位移一对一;

制程控制

PLC控制方式;

操作界面

全图形化中文彩色人机界面(10.4彩屏);

槽体数量

根据制程工艺要求选择定制;

设备制造

北京华林嘉业科技有限公司(CGB);

页面版权所有@ 北京华林嘉业科技有限公司.京ICP备09080401号.京公网安备11011202001537号
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